DECEMBER 2008
enersave’s breakthrough in Singapore Wafer Fab

Project Snapshot

Client: Chartered Semiconductor Manufacturing Ltd
Location: Woodlands, Singapore
Plant: Fab 7C
Details: Turnkey supply of Continuous Electrodeionization (CEDI) system
Project Start/Finish dates: May/Oct 2008

Chartered Semiconductor Manufacturing Ltd. (Nasdaq: CHRT, SGX-ST: CHARTERED), one of the world’s top dedicated semiconductor foundries, offers leading-edge technologies down to 65 nanometer (nm), enabling today’s system-on-chip designs. The company further serves its customers’ needs through a collaborative, joint development approach on a technology roadmap that extends to 22nm. Chartered’s strategy is based on open and comprehensive design enablement solutions, manufacturing enhancement strategies, and a commitment to flexible sourcing. In Singapore, the company operates a 300mm fabrication facility and five 200mm facilities. Information about Chartered can be found at www.charteredsemi.com.

EES Technology Pte Ltd, a subsidiary of Enersave Group in Singapore successfully secured a contract from Chartered to design, supply, deliver, install and commission 6 CEDI skids each with a capacity of 150 usgpm in May 2008. The CEDI skids were delivered and installed in a record time of 4 months from the date of award. The CEDI system consists of 3 nos.VNX50-EX modules per CEDI skid from IONPURE®. These modules are the first of kind in any wafer fab globally. This is an automatic system with high purity PVDF piping for the feed and product water streams.

The key challenges and the success story of Enersave in this project can be summarized as follows:

• Design the CEDI skid to manage limited space availability
• Fabricate, deliver, install and commission the CEDI system in the shortest possible time.

The feed to the CEDI system is pretreated by a two (2) pass RO, TOC reducers and Gas Transfer Membranes (GTM). The product water quality from these units are meeting specifications with a resistivity of => 16MΩ.cm @ 25 °C and a TOC value of <=5ppb. Currently the units are operating at 6-7 amps producing the required water quality.